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Product

MEMS Pressure Sensor

The MEMS pressure sensor element (Gauge Pressure/Absolute Pressure/Differential Pressure) of NOVOSENSE is based on the piezoresistive effect of silicon with advanced MEMS micromachining technology, it can realize the low pressure detection (- 100kPa to 400kPa) in a wide temperature range(-40 ℃ ~ 130 ℃) and the device with pre-calibration can greatly simplify the design in customer side, which can be widely used in automotive, industrial control, medical electronics, household appliances and any other markets. Packaged & factory calibrated products could greatly simplify the customer system design. In addition, the special version with the noble-metal, double-pad structure and shielding layer technology is also an ideal solution for the harsh environment such as FTPS/EVAP, DPF/GPF and EGR-TMAP.

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  • Product type
    Absolute pressure sensor
    Gauge pressure sensor
    MEMA absolute pressure sensor
    MEMS differential pressure sensor
    MEMS micro differential pressure sensor
  • Product description
  • Package
    SOP-6
    SOP-8
    DIP-8
    MEMS wafer
    SOIC-16
  • Package dimensions (mm X mm)
    1.0mm × 1.0mm x 0.4mm
    1.65mm × 1.65mm x 0.4mm
    1.8mm × 1.8mm x 0.4mm
    2.0mm × 2.0mm x 0.4mm
    2.5mm × 2.5mm x 0.4mm
    7.0mm x 7.0mm
    7.3mm x 7.3mm
    10.0mm x 10.0mm
    10.26mm × 7.52mm
  • Air nozzle
    N
    Y
    /
  • Pressure range (kPa)
    -100~100
    -100~350
    -10~10
    -1~1
    0~200
    0~500
    10~400
  • Accuracy (%F.S.)
    ±0.1
    ±0.2
    ±0.5
    ±1
    ±1.5
  • Temperature range (℃)
    -20~85
    -40~125
    -40~130
    -40~150
    -40~70
    -40~85
    0~70
  • Supply voltage(v)
    0~5
    1~12
    3~5.5
    4.5~5.5
  • Operation current(mA) typical
    0.8
    1
    2.5
    2.9
    3
    3.1
  • Output type
    Absolute / Ratio-metric
    Analog /I2C/ Frequency
    Analog/I2C
    Analog voltage output
  • Full scale output (V)
    5
    20
    50
    85
    90
    100
  • Pre-factory calibration
    Y
    N
  • Automotive-qualified
    Y
    N

show 12 devices

Part Number Product type Product description Package Package dimensions (mm X mm) Air nozzle Pressure range (kPa) Accuracy (%F.S.) Temperature range (℃) Supply voltage(v) Operation current(mA) typical Output type Full scale output (V) Pre-factory calibration Automotive-qualified
NSPAS3
Absolute pressure sensor
Automotive-qualified integrated absolute pressure sensor (range can be customized)
SOP-8
7.0mm x 7.0mm
N
10~400
±0.5
-40~130
4.5~5.5
2.9
Absolute / Ratio-metric
5
Y
Y
NSPGD1
Gauge pressure sensor
Gauge pressure sensor integrated with air nozzle in DIP-8 package (range can be customized)
DIP-8
10.0mm x 10.0mm
Y
-10~10
±1
0~70
3~5.5
3
Analog /I2C/ Frequency
5
Y
N
NSPAS1
Absolute pressure sensor
Automotive-qualified integrated absolute pressure sensor (range can be customized)
SOP-8
7.3mm x 7.3mm
N
10~400
±0.5
-40~125
4.5~5.5
3.1
Absolute / Ratio-metric
5
Y
Y
NSPGS2
Gauge pressure sensor
Gauge pressure sensor integrated with air nozzle in SOP-6 package (range can be customized)
SOP-6
7.0mm x 7.0mm
Y
-100~350
±1.5
-40~70
3~5.5
2.5
Analog/I2C
5
Y
N
NSP1630
MEMA absolute pressure sensor
High-performance and high-reliability absolute pressure sensor (range can be customized)
MEMS wafer
1.0mm × 1.0mm x 0.4mm
/
0~200
±0.2
-40~125
1~12
1
Analog voltage output
85
N
Y
NSP1631
MEMA absolute pressure sensor
High-performance and high-reliability large-range absolute pressure sensor (range can be customized)
MEMS wafer
1.0mm × 1.0mm x 0.4mm
/
0~500
±0.2
-40~125
1~12
1
Analog voltage output
85
N
Y
NSP1632
MEMA absolute pressure sensor
High-performance and high-reliability automotive-qualified MEMS absolute pressure sensor with Pt pad (range can be customized)
MEMS wafer
1.0mm × 1.0mm x 0.4mm
/
0~200
±0.1
-40~150
1~12
1
Analog voltage output
90
N
Y
NSP1830
MEMS differential pressure sensor
High-performance and high-reliability MEMS differential pressure sensor (range can be customized)
MEMS wafer
1.8mm × 1.8mm x 0.4mm
/
-100~100
±0.2
-40~125
1~12
0.8
Analog voltage output
85
N
Y
NSP1831
MEMS differential pressure sensor
High-performance and high-reliability MEMS micro differential pressure sensor (range can be customized)
MEMS wafer
2.0mm × 2.0mm x 0.4mm
/
-10~10
±0.2
-40~125
1~12
1
Analog voltage output
50
N
Y
NSP1832
MEMS differential pressure sensor
High-performance and high-reliability automotive-qualified MEMS differential pressure sensor with PT pad (range can be customized)
MEMS wafer
1.65mm × 1.65mm x 0.4mm
/
-100~100
±0.1
-40~150
1~12
1
Analog voltage output
100
N
Y
NSP1833
MEMS micro differential pressure sensor
High-performance and high-reliability MEMS micro differential pressure sensor (range can be customized)
MEMS wafer
2.5mm × 2.5mm x 0.4mm
/
-1~1
±0.2
-40~85
1~12
1
Analog voltage output
20
N
N
NSPGS5
Gauge pressure sensor
Signal-nozzle integrated gauge pressure sensor (range can be customized)
SOIC-16
10.26mm × 7.52mm
Y
-10~10
±1
-20~85
0~5
2.9
Analog/I2C
5
Y
N

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