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MEMS Pressure Sensor
The MEMS pressure sensor element (Gauge Pressure/Absolute Pressure/Differential Pressure) of NOVOSENSE is based on the piezoresistive effect of silicon with advanced MEMS micromachining technology, it can realize the low pressure detection (- 100kPa to 400kPa) in a wide temperature range(-40 ℃ ~ 130 ℃) and the device with pre-calibration can greatly simplify the design in customer side, which can be widely used in automotive, industrial control, medical electronics, household appliances and any other markets. Packaged & factory calibrated products could greatly simplify the customer system design. In addition, the special version with the noble-metal, double-pad structure and shielding layer technology is also an ideal solution for the harsh environment such as FTPS/EVAP, DPF/GPF and EGR-TMAP.
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show 17 devices
| Part Number | Product type | Product description | Package | Package dimensions (mm X mm) | Air nozzle | Pressure range (kPa) | Accuracy (%F.S.) | Temperature range (℃) | Supply voltage（v) | Operation current(mA) typical | Output type | Full scale output (V) | Pre-factory calibration | Automotive-qualified |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| NSPGM2 | Gauge pressure sensor | Automotive integrated gauge pressure sensor module (range can be customized) | Ceramic substrate PCBA | 13.1 mmx 23.1mm | N | ±5~±100 | ±1.6 | -40℃~130℃ | 4.5V~5.5V | 2.9mA | Absolute / Ratio-metric | / | Y | Y |
| NSPAS3M | Absolute pressure sensor | Automotive-qualified integrated absolute pressure sensor (range can be customized) | SOP-8 | 7.0mm x 7.0mm | N | 10~400 | ±1.5 | -40~125 | 4.5~5.5 | 3.1 | Absolute / Ratio-metric | 5 | Y | Y |
| NSPAS3 | Absolute pressure sensor | Automotive-qualified integrated absolute pressure sensor (range can be customized) | SOP-8 | 7.0mm x 7.0mm | N | 10~400 | ±1 | -40~130 | 4.5~5.5 | 3.1 | Absolute / Ratio-metric | 5 | Y | Y |
| NSPAS1 | Absolute pressure sensor | Automotive-qualified integrated absolute pressure sensor (range can be customized) | SOP-8 | 7.3mm x 7.3mm | N | 10~400 | ±1 | -40~125 | 4.5~5.5 | 3.1 | Absolute / Ratio-metric | 5 | Y | Y |
| NSPGS2 | Gauge pressure sensor | Gauge pressure sensor integrated with air nozzle in SOP-6 package (range can be customized) | SOP-6 | 7.0mm x 7.0mm | Y | -100~250 | ±1.5 | -40~70 | 3~5.5 | 2.5 | Analog/I2C | 5 | Y | N |
| NSPGD1 | Gauge pressure sensor | Gauge pressure sensor integrated with air nozzle in DIP-8 package (range can be customized) | DIP-8 | 10.4mm x 10.4mm | Y | -10~10 | ±1 | 0~70 | 3~5.5 | 2.5 | Analog /I2C/ Frequency | 5 | Y | N |
| NSPDS9 | differential pressure sensor | Ultra-low range differential pressure sensor with dual air nozzle in SOIC-16 package (range can be customized) | Dual air nozzle SOIC-16 | 10.3mmx7.5mm | Y | ±125Pa~±500Pa | ±1.5 | -20~70 | 3~5.5 | 2.4 | Analog/I2C | / | Y | N |
| NSPDS5 | differential pressure sensor | Differential pressure sensor with dual air nozzle in SOIC-16 package (range can be customized) | Dual air nozzle SOIC-16 | 10.3mmx7.5mm | Y | ±500Pa~±250kPa | ±1 | -20~70 | 3~5.5 | 2.4 | Analog/I2C | / | Y | N |
| NSPDS7 | differential pressure sensor | Differential pressure sensor with dual air nozzle in SOIC-16 package (range can be customized) | Dual air nozzle SOIC-16 | 10.3mmx7.5mm | Y | ±500Pa~±250kPa | ±1 | -20~70 | 3~5.5 | 2.4 | Analog/I2C | / | Y | N |
| NSPGS5 | Gauge pressure sensor | Signal-nozzle integrated gauge pressure sensor (range can be customized) | SOIC-16 | 10.3mm × 7.5mm | Y | -10~10 | ±1 | -20~85 | 3~5.5 | 2.9 | Analog/I2C | 5 | Y | N |
| NSP1830 | MEMS differential pressure sensor | High-performance and high-reliability MEMS differential pressure sensor (range can be customized) | MEMS wafer | 1.8mm × 1.8mm x 0.4mm | / | -100~100 | ±0.2 | -40~125 | 1~12 | 0.8 | Analog voltage output | 0.065 | N | Y |
| NSP1831 | MEMS differential pressure sensor | High-performance and high-reliability MEMS micro differential pressure sensor (range can be customized) | MEMS wafer | 2.0mm × 2.0mm x 0.4mm | / | -10~10 | ±0.2 | -40~125 | 1~12 | 1 | Analog voltage output | 0.04 | N | Y |
| NSP1832 | MEMS differential pressure sensor | High-performance and high-reliability automotive-qualified MEMS differential pressure sensor with PT pad (range can be customized) | MEMS wafer | 1.65mm × 1.65mm x 0.4mm | / | -100~100 | ±0.1 | -40~150 | 1~12 | 1 | Analog voltage output | 0.085 | N | Y |
| NSP1833 | MEMS micro differential pressure sensor | High-performance and high-reliability MEMS micro differential pressure sensor (range can be customized) | MEMS wafer | 2.5mm × 2.5mm x 0.4mm | / | -1~1 | ±0.2 | -40~85 | 1~12 | 1 | Analog voltage output | 0.02 | N | N |
| NSP1630 | MEMS absolute pressure sensor | High-performance and high-reliability absolute pressure sensor (range can be customized) | MEMS wafer | 1.0mm × 1.0mm x 0.4mm | / | 0~200 | ±0.2 | -40~125 | 1~12 | 1 | Analog voltage output | 0.08 | N | Y |
| NSP1631 | MEMS absolute pressure sensor | High-performance and high-reliability large-range absolute pressure sensor (range can be customized) | MEMS wafer | 1.0mm × 1.0mm x 0.4mm | / | 0~500 | ±0.2 | -40~125 | 1~12 | 1 | Analog voltage output | 0.085 | N | Y |
| NSP1632 | MEMS absolute pressure sensor | High-performance and high-reliability automotive-qualified MEMS absolute pressure sensor with Pt pad (range can be customized) | MEMS wafer | 1.0mm × 1.0mm x 0.4mm | / | 0~200 | ±0.1 | -40~150 | 1~12 | 1 | Analog voltage output | 0.085 | N | Y |
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